A microfluidics-integrated impedance/surface acoustic resonance tandem sensor

Micromachined Amperometric Nitrate Sensor with Integrated Microfluidics

Nitrate-sensing system that consists of a micromachined sensor substrate, nitrate-permeable membrane, integrated microfluidic channels, and standard fluidic connectors has been designed, fabricated, assembled, and tested. Our microsensor was designed for in-situ monitoring of nitrate concentrations in ground water. A silver electrode was patterned for amperometric nitrate detection. An electroc...

Integrated CMOS Surface Acoustic Wave Gas Sensor: Design and Characteristics

The development of inexpensive and miniaturized Surface Acoustics Wave (SAW) gas sensors that are highly selective and sensitive is described. These sensors are implemented with micro-electro-mechanical systems (MEMS) in CMOS technology. IDT equivalent circuit and model for SAW delay line is introduced. Simulation results are included for characterization and design of the sensor. In this paper...

Ultrafast microfluidics using surface acoustic waves.

We demonstrate that surface acoustic waves (SAWs), nanometer amplitude Rayleigh waves driven at megahertz order frequencies propagating on the surface of a piezoelectric substrate, offer a powerful method for driving a host of extremely fast microfluidic actuation and microbioparticle manipulation schemes. We show that sessile drops can be translated rapidly on planar substrates or fluid can be...

A planar surface acoustic wave micropump for closed-loop microfluidics

Integrated Control of Microfluidics – Application in Fluid Routing, Sensor Synchronization, and Real-Time Feedback Control

Microfluidic applications range from combinatorial chemical synthesis to high-through‐ put screening, with platforms integrating analog perfusion components, digitally control‐ led microvalves, and a range of sensors that demand a variety of communication protocols. A comprehensive solution for microfluidic control has to support an arbitrary combination of microfluidic components and to meet t...